نوع مقاله : مقاله پژوهشی
نویسندگان
1 کارشناسی ارشد هوافضا، دانشگاه صنعتی خواجه نصیرالدین طوسی، تهران و نویسنده مسئول
2 عضو هیئت علمی دانشگاه و پژوهشگاه عالی دفاع ملی و تحقیقات راهبردی ، تهران
چکیده
کلیدواژهها
Alvin Barlian A., Roger T. Howe , Gregory T. A. Kovacs , Beth L. Pruitt (2006) "MICRO AND NANOSCALE EDUCATION AT STANFORD UNIVERSITY" , US, In Proceedings of the Solid-State Sensors, Actuators, and Microsystems Workshop.
Crone, Wendy C. (2008) "A brief introduction to MEMS and NEMS." Springer handbook of experimental solid mechanics" ,US, Springer.
Dan Tracy, Christian Gregor Dieseldorff, Edwin Hall (2007) A Glimpse into the European Semiconductor and Emerging Technology Industries ,available at http://www.semi.org/en/glimpse-european-semiconductor-and-emerging-technology-industries.
Guckel, H, Christenson, T. R., Skrobis, K. J., Jung, T. S., Klein, J., Hartojo, K. V., & Widjaja, I. (February 1993) "A first functional current excited planar rotational magnetic micromotor". IEEE.
L.S. Fan, Y.C. Tai and R.S. Muller(jun 1988) "Integrated movable micromechanical structure for sensors and actuators" IEEE Transactions on Electron Devices. Vol. 35, No 6.
Minhang Bao, Weiyuan Wang (August 1996) "Future of microelectromechanicalsystems (MEMS) " ,Journal of Sensors and Actuators. Vol. 56, NO 2.
Marie Freebody (2010) Consumers Dominate MEMS Market , available at https://www.photonics.com/a43371/Consumers_Dominate_MEMS_Market.
Colin Johnson R. (2013) MEMS Market to Top $22 billion by 2018 , available at https://www.eetimes.com/document.asp?doc_id=1320035.
Roukes, M. (2001) "Nanoelectromechanical systems face the future" Physics World. Vol. 14, Nom 2.
Solid State Tehnology (2012) MEMS supply chain stronger 1 year after Japanese earthquake, available at http://electroiq.com/blog/2012/03/mems-supply-chain.
Variant Market Research (2017) Bio-MEMS Market ,available at https://www.variantmarketresearch.com/report-categories/medical-devices/bio-mems-market.
Variant Market Research (2017) Nanoelectromechanical Systems Market ,available at
https://www.variantmarketresearch.com/report categories/semiconductor-electronics/nanoelectromechanical-systems-market.
Zion Market Research (2017) Global Microelectromechanical Systems Market Set for Rapid Growth, to Reach around USD 19.20 billion by 2022, available at https://www.zionmarketresearch.com/news/microelectromechanical-systems-market.
Zion Market Research (2017) Global Nanoelectromechanical Systems Market Set for Rapid Growth, to Reach Around USD 102.03 Million by 2022 , available at https://www.zionmarketresearch.com/news/nanoelectromechanical-systems-market.